De Luca, A.
Cole, M.T.
Hopper, R.H.
Ali, S.Z.
Udrea, F.
Gardner, J.W.
Milne, W.I.
This article is maintained by: Elsevier
Article Title: SOI CMOS MEMS Infra-red Thermal Source with Carbon Nanotubes Coating
Journal Title: Procedia Engineering
CrossRef DOI link to publisher maintained version: https://doi.org/10.1016/j.proeng.2014.11.284
Content Type: article
Copyright: Copyright © 2014 The Authors. Published by Elsevier Ltd.