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Real-time plasma monitoring technique using incident-angle-dependent optical emission spectroscopy for computer-integrated manufacturing

Crossref DOI link: https://doi.org/10.1016/j.rcim.2018.02.003

Published Print: 2018-08

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Authors

Kim, In Joong

Yun, Ilgu
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This article is maintained by: Elsevier

Article Title: Real-time plasma monitoring technique using incident-angle-dependent optical emission spectroscopy for computer-integrated manufacturing

Journal Title: Robotics and Computer-Integrated Manufacturing

CrossRef DOI link to publisher maintained version: https://doi.org/10.1016/j.rcim.2018.02.003

Content Type: article

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