Schulte-Braucks, C.
Glass, S.
Hofmann, E.
Stange, D.
von den Driesch, N.
Hartmann, J.M.
Ikonic, Z.
Zhao, Q.T.
Buca, D.
Mantl, S.
Funding for this research was provided by:
EU FP7 project (619509)
BMBF project
This article is maintained by: Elsevier
Article Title: Process modules for GeSn nanoelectronics with high Sn-contents
Journal Title: Solid-State Electronics
CrossRef DOI link to publisher maintained version: https://doi.org/10.1016/j.sse.2016.10.024
Content Type: article
Copyright: © 2016 Elsevier Ltd. All rights reserved.