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Framework to model neutral particle flux in convex high aspect ratio structures using one-dimensional radiosity

Crossref DOI link: https://doi.org/10.1016/j.sse.2016.10.029

Published Print: 2017-02

Update policy: https://doi.org/10.1016/elsevier_cm_policy

Authors

Manstetten, Paul

Filipovic, Lado

Hössinger, Andreas

Weinbub, Josef

Selberherr, Siegfried
Funding

Funding for this research was provided by:

Austrian Federal Ministry of Science, Research and Economy

National Foundation for Research, Technology and Development
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This article is maintained by: Elsevier

Article Title: Framework to model neutral particle flux in convex high aspect ratio structures using one-dimensional radiosity

Journal Title: Solid-State Electronics

CrossRef DOI link to publisher maintained version: https://doi.org/10.1016/j.sse.2016.10.029

Content Type: article

Copyright: © 2016 Elsevier Ltd. All rights reserved.