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Atmospheric pressure dielectric barrier discharge (DBD) for post-annealing of aluminum doped zinc oxide (AZO) films

Crossref DOI link: https://doi.org/10.1016/j.surfcoat.2014.04.004

Published Print: 2014-07

Update policy: https://doi.org/10.1016/elsevier_cm_policy

Authors

Ritz, Eithan

Wu, Yui Lun

Hong, Jungmi

Andruczyk, Daniel

Cho, Tae S.

Ruzic, D.N.
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This article is maintained by: Elsevier

Article Title: Atmospheric pressure dielectric barrier discharge (DBD) for post-annealing of aluminum doped zinc oxide (AZO) films

Journal Title: Surface and Coatings Technology

CrossRef DOI link to publisher maintained version: https://doi.org/10.1016/j.surfcoat.2014.04.004

Content Type: article

Copyright: Copyright © 2014 Elsevier B.V. All rights reserved.