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Thermal conductivity of titanium nitride/titanium aluminum nitride multilayer coatings deposited by lateral rotating cathode arc

Crossref DOI link: https://doi.org/10.1016/j.tsf.2015.02.032

Published Print: 2015-03

Update policy: https://doi.org/10.1016/elsevier_cm_policy

Authors

Samani, M.K.

Ding, X.Z.

Khosravian, N.

Amin-Ahmadi, B.

Yi, Yang

Chen, G.

Neyts, E.C.

Bogaerts, A.

Tay, B.K.
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Article Title: Thermal conductivity of titanium nitride/titanium aluminum nitride multilayer coatings deposited by lateral rotating cathode arc

Journal Title: Thin Solid Films

CrossRef DOI link to publisher maintained version: https://doi.org/10.1016/j.tsf.2015.02.032

Content Type: article

Copyright: Copyright © 2015 Elsevier B.V. All rights reserved.