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Tailoring of titanium thin film properties in high power pulsed magnetron sputtering

Crossref DOI link: https://doi.org/10.1016/j.vacuum.2018.01.039

Published Print: 2018-04

Update policy: https://doi.org/10.1016/elsevier_cm_policy

Authors

Wu, Baohua

Yu, Yan

Wu, Jian

Shchelkanov, Ivan

Ruzic, David N.

Huang, Nan

Leng, Y.X.
Funding

Funding for this research was provided by:

NSAF (U1330113)

NSFC (31300787)

Doctoral Innovation Fund Program of Southwest Jiaotong University

China Scholarship Council
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Article Title: Tailoring of titanium thin film properties in high power pulsed magnetron sputtering

Journal Title: Vacuum

CrossRef DOI link to publisher maintained version: https://doi.org/10.1016/j.vacuum.2018.01.039

Content Type: article

Copyright: © 2018 Elsevier Ltd. All rights reserved.