Yang, Kyung Chae
Shin, Ye Ji
Tak, Hyun Woo
Lee, Wonseok
Lee, Seung Bae
Yeom, Geun Young
Funding for this research was provided by:
NRF (2016M3A7B4910429)
SEMES
This article is maintained by: Elsevier
Article Title: Effects of superimposed dual-frequency (13.56/2 MHz) inductively coupled plasma source on the uniformity of Ar/CF4 plasma
Journal Title: Vacuum
CrossRef DOI link to publisher maintained version: https://doi.org/10.1016/j.vacuum.2019.108802
Content Type: article
Copyright: © 2019 Published by Elsevier Ltd.