McElhinny, K M
Gopalakrishnan, G
Savage, D E
Silva-Martínez, Juan C
Lagally, M G
Holt, M V
Evans, P G
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: Fabrication of flat SiGe heterostructure nanomembrane windows via strain-relief patterning
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-08-29
Date accepted: 2014-11-03
Online publication date: 2014-12-03