Liu, Fei-Xiang
Tsankov, Tsanko V
Pu, Yi-Kang
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: The electron density evolution in pulsed 60 MHz capacitively coupled oxygen discharges
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-10-20
Date accepted: 2014-12-03
Online publication date: 2015-01-05