McCoy, A P
Bogan, J
Walsh, L
Byrne, C
O’Connor, R
Woicik, J C
Hughes, G
Funding for this research was provided by:
Science Foundation Ireland (13/IA/1955, 13/TIDA/I2753)
Advanced Research Projects Agency Energy (DE-AC02-98CH10886)
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: The impact of porosity on the formation of manganese based copper diffusion barrier layers on low-κ dielectric materials
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-04-07
Date accepted: 2015-06-22
Online publication date: 2015-07-13