Tinck, Stefan
Bogaerts, Annemie
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: Computational study of the CF4 /CHF3 / H2 /Cl2 /O2 /HBr gas phase plasma chemistry
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2015-05-28
Date accepted: 2015-11-09
Online publication date: 2016-04-14