Han, Kai
Wang, Xiaolei
Yuan, Li
Wang, Wenwu
Funding for this research was provided by:
National Natural Science Foundation of China (61404093, 61504163, 61574168)
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: Investigation of spatial charge distribution and electrical dipole in atomic layer deposited Al2O3on 4H-SiC
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2016-02-04
Date accepted: 2016-03-31
Online publication date: 2016-05-03