Wang, Junkang
Bulkin, Pavel
Florea, Ileana
Maurice, Jean-Luc
Johnson, Erik
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: Microcrystalline silicon thin films deposited by matrix-distributed electron cyclotron resonance plasma enhanced chemical vapor deposition using an SiF4 /H2chemistry
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2016-02-08
Date accepted: 2016-05-27
Online publication date: 2016-06-21