Hovish, Michael Q
Dauskardt, Reinhold H
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: Optical properties of metal oxynitride thin films grown with atmospheric plasma deposition
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2016-06-03
Date accepted: 2016-07-28
Online publication date: 2016-09-06