Boileau, Alexis
Gries, Thomas
Noël, Cédric
Cardoso, Rodrigo Perito
Belmonte, Thierry
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: Sub-micro a-C:H patterning of silicon surfaces assisted by atmospheric-pressure plasma-enhanced chemical vapor deposition
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2016-05-19
Date accepted: 2016-08-31
Online publication date: 2016-10-11