Kozák, Tomáš
Vlček, Jaroslav
Funding for this research was provided by:
Czech Science Foundation (GA14-03875S)
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: A parametric model for reactive high-power impulse magnetron sputtering of films
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2015-07-21
Date accepted: 2015-11-05
Online publication date: 2015-12-15