Seidel, F
Richard, O
Bender, H
Vandervorst, W
Funding for this research was provided by:
Agentschap voor Innovatie door Wetenschap en Technologie (121299)
Journal title: Semiconductor Science and Technology
Article type: paper
Article title: Post-ion beam induced degradation of copper layers in transmission electron microscopy specimens
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-03-28
Date accepted: 2015-08-21
Online publication date: 2015-10-15