Johannes, Andreas
Holland-Moritz, Henry
Ronning, Carsten
Journal title: Semiconductor Science and Technology
Article type: rev
Article title: Ion beam irradiation of nanostructures: sputtering, dopant incorporation, and dynamic annealing
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-07-18
Date accepted: 2015-01-07
Online publication date: 2015-02-12