Carbaugh, Daniel J
Wright, Jason T
Parthiban, Rajan
Rahman, Faiz
Journal title: Semiconductor Science and Technology
Article type: paper
Article title: Photolithography with polymethyl methacrylate (PMMA)
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2015-07-29
Date accepted: 2015-11-23
Online publication date: 2015-12-21