Zhu, Wu-Le
Yang, Shunyao
Ju, Bing-Feng
Jiang, Jiacheng
Sun, Anyu
Funding for this research was provided by:
National High Technology Research and Development Program of China (863 Program) (2012AA040405)
National Basic Research Program of China (973 Program) (2011CB706505)
Science Fund for Creative Research Groups of National Natural Science Foundation of China (51221004)
National Natural Science Foundation of China (51175467, 51425504)
China Scholarship Council (201406320148)
Journal title: Measurement Science and Technology
Article type: paper
Article title: On-machine measurement of a slow slide servo diamond-machined 3D microstructure with a curved substrate
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-01-09
Date accepted: 2015-04-02
Online publication date: 2015-06-12