Dai, Gaoliang
Zhu, Fan
Fluegge, Jens
Journal title: Measurement Science and Technology
Article type: paper
Article title: High-speed metrological large range AFM
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-03-02
Date accepted: 2015-06-09
Online publication date: 2015-07-21