Liu, Jian
Li, Mengzhou
Li, Qiang
Tan, Jiubin
Funding for this research was provided by:
National Nature Science Foundation of China (51275121)
Fundamental Researches Program for Defence Industry (2013XE0873)
National Major Scientific Instrument and Equipment Development Project (2011YQ040087)
Journal title: Measurement Science and Technology
Article type: paper
Article title: Decoupling criterion based on limited energy loss condition for groove measurement using optical scanning microscopes
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2016-05-25
Date accepted: 2016-10-18
Online publication date: 2016-11-02