Zhang, L
Heinig, N F
Bazargan, S
Abd-Ellah, M
Moghimi, N
Leung, K T
Journal title: Nanotechnology
Article type: paper
Article title: Direct-write three-dimensional nanofabrication of nanopyramids and nanocones on Si by nanotumefaction using a helium ion microscope
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-01-25
Date accepted: 2015-04-24
Online publication date: 2015-06-04