Buja, Federico
Fiorentino, Giuseppe
Kokorian, Jaap
Spengen, W Merlijn van
Funding for this research was provided by:
NWO -STW (Vidi program under ref no. 10771.)
Journal title: Nanotechnology
Article type: paper
Article title: Observation of nanoscale adhesion, friction and wear between ALD Al2O3coated silicon MEMS sidewalls
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-03-03
Date accepted: 2015-04-29
Online publication date: 2015-05-29