Meng, Lingkuan https://orcid.org/0000-0002-0852-9529
He, Xiaobin
Gao, Jianfeng
Li, Junjie
Wei, Yayi
Yan, Jiang
Funding for this research was provided by:
Chinese National Science and Technology Major Project (2009ZX02035)
Journal title: Nanotechnology
Article type: paper
Article title: A straightforward and CMOS-compatible nanofabrication technique of periodic SiO2 nanohole arrays
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-03-20
Date accepted: 2015-09-01
Online publication date: 2015-09-22