Li, Luping
Fang, Yin
Xu, Cheng
Zhao, Yang
Zang, Nanzhi
Jiang, Peng
Ziegler, Kirk J
Funding for this research was provided by:
National Science Foundation (CBET-1033736)
the University of Florida Opportunity Fund
US National Aeronautics and Space Administration (NASA) (NNX14AB07G)
Donors of the American Chemical Society Petroleum Research Fund
Journal title: Nanotechnology
Article type: paper
Article title: Fabricating vertically aligned sub-20 nm Si nanowire arrays by chemical etching and thermal oxidation
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2015-11-22
Date accepted: 2016-01-27
Online publication date: 2016-03-08