Chiappim, W
Testoni, G E
Doria, A C O C
Pessoa, R S
Fraga, M A
Galvão, N K A M
Grigorov, K G
Vieira, L
Maciel, H S
Funding for this research was provided by:
Conselho Nacional de Desenvolvimento Cientifico e Tecnologico (305496/2012-3)
Conselho Nacional de Desenvolvimento Cientifico e Tecnologico (446545/2014-7)
Fundacao de Amparo a Pesquisa do Estado de Sao Paulo (2011/50773-0)
Fundacao de Amparo a Pesquisa do Estado de Sao Paulo (2015/10876-6)
Fundacao de Amparo a Pesquisa do Estado de Sao Paulo (2015/05956-0)
Brazilian Space Agency (AEB/Uniespaco)
Journal title: Nanotechnology
Article type: paper
Article title: Relationships among growth mechanism, structure and morphology of PEALD TiO2films: the influence of O2plasma power, precursor chemistry and plasma exposure mode
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2016-04-11
Date accepted: 2016-05-17
Online publication date: 2016-06-15