Tasdemir, Zuhal
Wollschläger, Nicole
Österle, Werner
Leblebici, Yusuf
Alaca, B Erdem
Funding for this research was provided by:
Koc University-Istanbul Rotary Club Fundamental Research Seed Fund Program
Swiss Government Excellence Grant
European Metrology Research Programme (EMRP)
Tubitak
Journal title: Nanotechnology
Article type: paper
Article title: A deep etching mechanism for trench-bridging silicon nanowires
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2015-11-14
Date accepted: 2016-01-07
Online publication date: 2016-02-08