Guo, Honglei
Liu, Jingquan
Yang, Bin
Chen, Xiang
Yang, Chunsheng
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Localized etching of polymer films using an atmospheric pressure air microplasma jet
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-06-23
Date accepted: 2014-11-28
Online publication date: 2014-12-30