Bagolini, Alvise
Savoia, Alessandro Stuart
Picciotto, Antonino
Boscardin, Maurizio
Bellutti, Pierluigi
Lamberti, Nicola
Caliano, Giosuè
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: PECVD low stress silicon nitride analysis and optimization for the fabrication of CMUT devices
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-07-22
Date accepted: 2014-11-24
Online publication date: 2014-12-30