Cao, Yun
Xi, Zhanwen
Yu, Pingxin
Wang, Jiong
Nie, Weirong
Funding for this research was provided by:
National Natural Science Foundation of China (51475245)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: A MEMS inertial switch with a single circular mass for universal sensitivity
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-05-26
Date accepted: 2015-07-30
Online publication date: 2015-09-08