Groen, Maarten S
Brouwer, Dannis M
Lötters, Joost C
Wiegerink, Remco J
Funding for this research was provided by:
Ministry of Economic Affairs (PNE101004)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Miniature proportional control valve with top-mounted piezo bimorph actuator with millisecond response time
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-04-23
Date accepted: 2015-07-27
Online publication date: 2015-09-09