Yang, Tao
Bellouard, Yves
Funding for this research was provided by:
European Research Council (Stg Galatea - 307442)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Monolithic transparent 3D dielectrophoretic micro-actuator fabricated by femtosecond laser
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-05-08
Date accepted: 2015-07-31
Online publication date: 2015-09-09