Campanella, Humberto
Narducci, Margarita
Soon, Jeffrey B W
Merugu, Srinivas
Ferrari, Marco
Ferrari, Vittorio
Singh, Navab
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Multi-sensitive temperature sensor platforms using aluminum nitride MEMS resonators
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-05-25
Date accepted: 2015-08-24
Online publication date: 2015-10-07