Gleeson, Peter
Lin, Kevin
Potie, Alexis
Pawashe, Chytra
P de Silva, Johann
Cross, Graham L W
Boland, John J
Funding for this research was provided by:
Science Foundation Ireland (SFI/12/RC/2278)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: The effect of device fabrication on quasi-static elastic behaviour of silicon nanocantilever arrays
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-06-23
Date accepted: 2015-09-22
Online publication date: 2015-10-22