Goj, Boris
Dressler, Lothar
Hoffmann, Martin
Funding for this research was provided by:
Bundesministerium fur Wirtschaft und Technologie (KF2731206DB4)
Deutsche Forschungsgemeinschaft (SFB622)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Design and characterization of a resonant triaxial microprobe
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-07-16
Date accepted: 2015-09-17
Online publication date: 2015-10-30