Cheng, Chao-Lin
Chang, Heng-Chung
Chang, Chun-I
Fang, Weileun
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Development of a CMOS MEMS pressure sensor with a mechanical force-displacement transduction structure
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-07-15
Date accepted: 2015-09-29
Online publication date: 2015-11-09