Talbi, A
Gimeno, L
Gerbedoen, J-C
Viard, R
Soltani, A
Mortet, V
Preobrazhensky, V
Merlen, A
Pernod, P
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: A micro-scale hot wire anemometer based on low stress (Ni/W) multi-layers deposited on nano-crystalline diamond for air flow sensing
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-04-17
Date accepted: 2015-10-19
Online publication date: 2015-11-18