Gao, Yongfeng
You, Zheng
Zhao, Jiahao
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Electrostatic comb-drive actuator for MEMS relays/switches with double-tilt comb fingers and tilted parallelogram beams
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-09-01
Date accepted: 2015-01-06
Online publication date: 2015-02-25