Huovinen, Eero
Suvanto, Mika
Pakkanen, Tapani A
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Multicomponent surface materials: subsequent surface structuring and deposition
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-11-26
Date accepted: 2015-02-24
Online publication date: 2015-03-31