Gerson, Y
Nachmias, T
Maimon, R
Krylov, S
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Mesoscale MEMS motion transformer and amplifier electrostatically actuated by parallel plate electrodes
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-10-13
Date accepted: 2015-02-09
Online publication date: 2015-04-07