Endrödy, Csaba
Mehner, Hannes
Grewe, Adrian
Hoffmann, Martin
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Linear micromechanical stepping drive for pinhole array positioning
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-11-17
Date accepted: 2015-03-06
Online publication date: 2015-04-07