Qiu, Huacheng
Schwarz, Patrick
Feili, Dara
Wu, Xuezhong
Seidel, Helmut
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Air damping of micro bridge resonator vibrating close to a surface with a moderate distance
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-10-29
Date accepted: 2015-03-09
Online publication date: 2015-04-17