Petersen, Ritika Singh
Keller, Stephan Sylvest
Hansen, Ole
Boisen, Anja
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Fabrication of Ni stamp with high aspect ratio, two-leveled, cylindrical microstructures using dry etching and electroplating
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-12-14
Date accepted: 2015-02-18
Online publication date: 2015-04-17