Lee, Jae-Wung
Sharma, Jaibir
Narducci, Margarita Sofia
Merugu, Srinivas
Lin, Zhang Xiao
Singh, Navab
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Cavity-enhanced sacrificial layer micromachining for faster release of thin film encapsulated MEMS
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-02-02
Date accepted: 2015-03-18
Online publication date: 2015-05-15