Montoliu, C
Baer, E
Cerdá, J
Colom, R J
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Improvement of feature-scale profile evolution in a silicon dioxide plasma etching simulator using the level set method
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-12-18
Date accepted: 2015-04-13
Online publication date: 2015-05-15