Hajmirzaheydarali, M
Akbari, M
Soleimani-Amiri, S
Sadeghipari, M
Shahsafi, A
Akhavan Farahani, A
Mohajerzadeh, S
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Vertically etched silicon nano-rods as a sensitive electron detector
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-12-18
Date accepted: 2015-03-04
Online publication date: 2015-06-03