Sareło, K
Górecka-Drzazga, A
Dziuban, J A
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Optical detection system for MEMS-type pressure sensor
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-12-19
Date accepted: 2015-04-29
Online publication date: 2015-06-18