Buchheit, Thomas E
Phinney, Leslie M
Funding for this research was provided by:
U.S. Department of Energy National Nuclear Security Administration (DE-AC04-94AL85000)
DoD/DOE Joint Munitions Technology Development Program (JMP)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Fracture strength characterization for 25 micron and 125 micron thick SOI-MEMS structures
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-04-02
Date accepted: 2015-04-27
Online publication date: 2015-06-08